The DF-200 series is a high-performance digital mass flow controller with ±1%S.P. accuracy and ≤1-sec response.
It also has a multiple-gas and multiple-range function of seven gases and the ease of changing the flow rate range of each gas.
Feature
- High accuracy(±1%RD),Fast response(1 sec.max.in all range)
- Multiple ranges and multiple gases supported
- Communications functions installed as a standard feature(RS485)
- RoHS/CE Standard compliant
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Specification
| Sensor type | Thermal sensor | |
| Valve type | Normally closed proportional solenoid valve | |
| Applicable gases*1 | Multiple gases: N2 (Air, H2, He, Ar, O2, CO2)*2 | |
| Flow range*3 | 10/30/50/100/300/500 SCCM, 1/3/5/10 SLM*2 | |
| Control range | 2 to 100% (F.S.) | |
| Response*4 | Total flow rate control range ±1 sec (within ±2% F.S.) | |
| Accuracy*5 | ±1.0% S.P. (> 35% F.S.) ±0.35% F.S. (≤ 35% F.S.) | |
| Repeatability | ±0.25% F.S. | |
| Operating differential pressure*6 | 50 to 300 kPa (100 to 300 kPa for Ar and CO2) | |
| Inlet maximum pressure | 500kPa（G） | |
| Proof pressure | 980kPa（G） | |
| External leak rate | ≤1.0 x 10-8 Pa·m3/sec (He) | |
| Temperature | Working temp. | 5 to 50℃ |
| Accuracy guaranteed temp. | 15 to 35℃ | |
| Allowable storage temp. | -10 to 60℃ | |
| Allowable operating humidity | 10 to 90% RH (without dew condensation) | |
| Materials of a gas contact part | SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM | |
| Electrical connection | D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two) | |
| Flow rate setting signal | 0 to 5 V DC (input impedance: approx. 1 MΩ) | |
| Flow rate output signal | 0 to 5 V DC (load resistance 10 kΩ) | |
| Digital communication | Address setting with RS485 rotary switch: up to 99 devices (9600 bps) | |
| Required power supply (DC) | +15 V DC (±5%): 150 mA, -15 V DC (±5%): 150 mA | |
| Joint*7 | 1/4 F900 (standard), 1/4 UJR, Rc 1/4 | |
| Mounting posture | Horizontal installation recommended. | |
| Weight*8 | Approx. 850 g | |
*1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
*2 Dedicated software is available to change gases or change the actual full scale (F.S.) within the range of 30 to 100% (30 to 80% for CO2 only) of the specified full scale.
*3 The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
*4 Guarantee for calibration gas: N2.
*5 Accuracy for calibration gas: N2, flow range (max. full scale).
*6 The operating differential pressure may differ depending on specifications.
*7 Contact us for any other joints.
*8 Exclusive of the weight of joint
For further
information please contact : marketing@wmablog.com