Digital mass flow device which is adopted the own developed both stable high-speed thermal sensors and small proportional solenoid valves and is realized high accuracy and quick response with RS 485 communication in spite of compact.
Feature
- Lower cost but high accuracy measurement
- High-speed response and zero stability
- 0-5VDC or 4-20mA Input/output signal and +/-15VDC or 24VDC power supply
- Mediocrity D-sub 9pin
- Gases registered in EX-250S are usable by rotary-switch
*Calculate the flow rate with conversion factor based onN2 gas - RoHS compliance, CE marked
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Specification
| Model | Mass Flow Controller | Mass Flow Meter | |
| EX-250SC | EX-250SM | ||
| Sensor type | Thermal sensor | ||
| Valve type | Normally closed proportional solenoid valve | – | |
| Applicable gases（*1） | N2、Air、H2、He、Ar、O2、CO2 etc. | ||
| (Gases not specifically mentioned here are subject to calibration for N2 equivalent.) | |||
| Flow range（*2） | 10SCCM ～ 5SLM | ||
| Control（measure）range | 2 ～ 100%(F.S.) | ||
| Response | ≤ 1sec （within ± 2%F.S.）（*8） | ||
| Accuracy（*3） | ± 1.0%F.S. | ||
| Repeatability | ± 0.2%F.S. | ||
| Operating differential pressure（*4） | 50 ～ 300kPa（Ar、CO2：１00kPa ～ 300kPa） | – | |
| Inlet maximum pressure | 500kPa（G） | ||
| Proof pressure | 980kPa（G） | ||
| External leak rate（He） | ≤ 1.0 × 10-8Pa・m3/sec | ||
| Temperature | Working temp. | 5 ～ 50℃ | |
| Accuracy guaranteed temp. | 15 ～ 35℃ | ||
| Allowable storage temp. | -10 ～ 60℃ | ||
| Allowable operating humidity | 10 ～ 90%RH (without dew condensation) | ||
| Materials of a gas contact part | SUS316, SUS316L, magnetic stainless steel（*5）, PTFE, FKM | ||
| Electrical connection | Dsub 9pin KFC Standard（SEMI standard is compliant） | ||
| HR-10A | |||
| Flow rate setting signal | 0～5VDC(input impedance: approx. 1M Ω) | – | |
| or 4～20mA(input impedance: approx. 250 Ω) | |||
| Flow rate output signal | 0 ～ 5VDC( load resistance ≧10k Ω) | ||
| or 4 ～ 20mA( load resistance ≧500 Ω) | |||
| Digital communication | RS485 rotary-switch address setting | ||
| Required power supply (DC) | +15VDC( ± 5%)100mA , -15VDC（± 5%）150mA | ||
| or +24VDC（± 10%） ≤180mA (MFM would be ≤100mA) | |||
| Joint（*6） | 1/4F900（standard） | ||
| Mounting posture | Horizontal installation recommended. | ||
| Weight（*7） | Approx.500g | Approx.440g | |
For further
information please contact : marketing@wmablog.com