Kofloc Low-Cost Metal Sealed Mass Flow Meter Model 5400

The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to the conventional MFC. The sensor drive system is improved : the zero-drift is further  reduced and the response in the lower range is improved . The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 series.

Features :

• Control and response in each setting range are improved.
• The following capability to the set voltage is improved (supporting ramping specifications).
• As the valve is improved, the control resolution in each range is improved

Standard Spesifications :

1. Flow range (N2 equivalent,20℃/1 atm) 

     5400  : 10 SCCM–20 SLM (freely selectable)

     5410 :  10 SCCM–20SLM(freely selectable)

2. Sensor

    5400  : Thermal mass flow sensor

3. Valve type 

    5400  : Proportional solenoid valve (closed when not energized)   

    5410 :  -

4. Control range 

    5400  : 2–100% (F.S.)                                   

    5410 :  -

5. Response 

    5400  : 1 sec. or less (0–100% within ±2% typical)                

    5410 :  -

6. Accuracy 

    5400  : ±1% F.S. (20℃)

7. Repeatability : Within ±0.2% F.S. (20℃)

8. Operating differential  pressure 

    5400  : F.S. ≤ 5 SLM: 50–300 kPa                                          

                F.S.> 5 SLM: 100–300 kPa           

    5410 :  -                       

                -           

9. Allowable operating pressure

    5400  : 300 kPa (G) or less

10. Proof pressure : 980 kPa (G)

11. Leak rate : 1 × 10-11 Pa•m3/s or less

12. Allowable ambient temperature  :  0–50℃ (Accuracy guaranteed at 15–35℃,   ±0.1% F.S./℃)

13. Allowable ambient humidity :   10–90% (No condensation allowed)

14. Materials of parts in  contact with gases :  

      - Body: SUS316L

      - Diaphragm: Ni-Co

      - Valve seat: PTFE

     - Sealing: SUS316L, Ni

15. Electric connection : Dsub 9-pin connector as per KFC Standard (Compliant with SEMI Standard)

16. Flow rate input signals   :

      5400  :  0–5 VDC (Input impedance: 1 MΩ or more)　 

      5410 :  -

17. Flow rate output signals :  0–5 VDC (Minimum load resistance: 250 kΩ or more)    

18. Required power supply :

      5400  :  +15 VDC (±5%) 100 mA,                    

                   −15VDC (±5%) 200mA       

                            

     5410 :  +15 VDC (±5%) 100 mA,

                 −15VDC (±5%) 100mA

19. Joint (Main unit bore) : Standard: 1/4 VCR equivalent Option: 1/4 SWL

20. Weight 

      5400  :   Approx. 1000 g  

                                 

      5410 :  Approx. 800 g