Standard Mass Flow Controller
MODEL 3660 SERIES
Model 3660
Series Mass Flow Controller has been developed centerign the focus on
compactness and low cost and is being acclaimed by a wide range of users for
diverse appllications, including from laboratory research and devolopment activities to the use as
standartd mass flow control model for various types odf analyzers and vacuum devices
in the production line. Varieties of derived models and options are avaible.
Features
· - Equipped with an advancesd flow sensor of
constant-current temperature difference detection type tu ensure high-speed
response
· - Use of a normally closed valve to ensure safety
· - High reliabillity ensured using a selenoid
actuar
· - Low differential pressure type control avaible
for combustible gases (LP option)
Standard spesifications
1. Model : Flow range (N2 equivalent,20℃/1
atm)
3660 : 10 SCCM–20
SLM (freely selectable)
3665 : 30 SLM-100 SLM (freely selectable)
2. Model : Sensor
3660 : Thermal mass flow sensor
3. Model : Valve type
3660 : Proportional solenoid valve (closed
when not energized)
4. Model : Control range
3660 : 2–100% (F.S.)
3665 : 5–100% (F.S.)
5. Model : Response
3660 : 2 sec. or less (0–100% within ±2%
typical)
3665 : 3 sec. or less (0–100% within ±2%
typical)
6. Model : Accuracy
3660 : ±1.0% F.S. (25℃)
3665 : ±1.5%
F.S. (25℃)
7. Model : Temperature coefficient
3660 : ±0.1 F.S./℃ (15–35℃)
3665 : ±0.2
F.S./℃
(15–35℃)
8. Model : Repeatability
3660 : ±0.5%F.S.
9. Model : Operating differential pressure
3660 : F.S. ≤ 5 SLM: 50–300 kPa (G)
F.S. > 100 SLM: 50–300 kPa (G)
3665 : F.S. ≤ 50 SLM: 150–300 kPa (G)
F.S. > 50 SLM: 200–300 kPa (G)
Option : Medium differential pressure (MP)
and low differential pressure (LP) specifications are available.
10. Model : Allowable operating pressure
3660 : 500 kPa (G) or less
11. Model : Proof pressure
3660 : 980 kPa (G)
12. Model : Leak rate
3660 : 1 × 10-8 Pa.m3/s or less (excluding
permeation of He)
13. Model : Allowable ambient temperature
3660 : 5–45°C
14. Model : Allowable ambient humidity
3660 : 10–90% (No condensation allowed)
15. Model : Materials of parts in contact with gases
3660 : - Body: SUS316
- Valve seat: FKM (option: CR or NBR)
- Sealing: FKM (option: CR or NBR)
16. Model : Electric connection
3660 : Dsub 9-pin connector as per KFC
Standard (Compliant with SEMI Standard)
17. Model : Flow rate input signals
3660 : 0–5 VDC (Input impedance: 1 MΩ or more)
18. Model : Flow rate output signals
3660 : 0–5 VDC (External load resistance:
250 kΩ or more)
19. Model : Required power supply
3660 : +15 VDC (±5%) 100 mA, −15 VDC (±5%)
250 mA
20. Model : Joint (Main unit bore)
3660 : - Standard: 1/4SWL
- Option: 1/8SWL 1/4VCR RC1/4, etc.
- Option: 1/8SWL 1/4VCR RC1/4, etc.
3665 : - Standard: 3/8SWL
- Option: 1/2SWL 3/8VCR RC3/8, etc.
- Option: 1/2SWL 3/8VCR RC3/8, etc.
21. Model
: Weight
3660
: Approx. 1000 g
3665
: Approx. 1500 g
!!Note!!
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.
Specifications relating to the flow range (e.g., flow range, accuracy and response) are expressed in N2 or air equivalent. The product will be built with the primary pressure of 300 kPa or less and the secondary side open to the atmosphere. For details on the pressure requirements, please contact us.
