The DF-250 series is a high-performance digital mass flow controller with ≤1 sec response less than 50SLM specification. The series offers a large flow rate line-up up to 300SLM.
Feature
- Standard gases are calibrated with actual gas
- ~50SLM model offers a fast response of ≤1 sec
- 10sccm ~ 300SLM flow range line-up
- Communications functions installed as a standard feature(RS485)
- RoHS/CE Standard compliant
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Specification
| Sensor type | Thermal sensor | ||||
| Valve type | Normally closed proportional solenoid valve | ||||
| Applicable gases*1 | N2, Air, H2, He, Ar, O2, CO2, etc. (Gases not specifically mentioned here are subject to calibration for N2 equivalent.) | Air, N2 | |||
| Flow range*2 | 10 SCCM to 10 SLM | 20 to 50 SLM (20 to 30 SLM for CO2) | 100, 150 SLM | 200, 300 SLM | |
| Control range | 2 to 100% (F.S.) | 5 to 100% (F.S.) | |||
| Response*3 | Total flow rate control range ≤ 1 sec (within ±2% F.S.) | ≤ 1.5 sec / ≤ 3 sec less than 10% (within ±2% F.S.) | ≤ 2 sec (within ±2% F.S.) | ||
| Accuracy*4 | ±1.0% F.S. | ±2.0% F.S | |||
| Repeatability | ±0.25%F.S. | ±0.5%F.S. | |||
| Operating differential pressure*5 | 50 to 300 kPa (100 to 300 kPa for Ar and CO2) | 100 to 300 kPa (150 to 300 kPa for Ar and CO2) | 150 to 350 kPa | 200 SLM: 200 to 350 kPa 300 SLM: 250 to 350 kPa | |
| Inlet maximum pressure | 500kPa（G） | ||||
| Proof pressure | 980kPa（G） | ||||
| External leak rate | ≤ 1.0 x 10-8 Pa·m3/sec (He) | ≤ 1.0 x 10-7 Pa·m3/sec (He) | |||
| Temperature | Working temp. | 5 to 50℃ | |||
| Accuracy guaranteed temp. | 15 to 35℃ | ||||
| Allowable storage temp. | -10 to 60℃ | ||||
| Allowable operating humidity | 10 to 90% RH (without dew condensation) | ||||
| Materials of gas contact part | SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM | ||||
| Electrical connection | D-sub 9-pin, KFC standard (SEMI standard compliant), RJ-45 modular jacks (two) | D-sub 9-pin , HR-10A (two) | |||
| Flow rate setting signal | 0 to 5 V DC (input impedance: approx. 1 MΩ) | ||||
| Flow rate output signal | 0 to 5 V DC (load resistance 10 kΩ) | ||||
| Digital communication | Address setting with RS485 rotary switch: up to 99 devices (9600 bps) | ||||
| Required power supply (DC) | +15 V DC (±5%) : 150 mA -15 V DC (±5%) : 150 mA | +15 V DC (±5%) : 150 mA -15 V DC (±5%) : 250 mA | 24 V DC (±10%) : 450 mA | ||
| Joint*6 | 1/4 F900 (standard), 1/4 UJR, Rc 1/4 | 1/2 SW (standard), 3/4 SW | |||
| Mounting posture | Horizontal installation recommended. | ||||
| Weight*7 | Approx. 850 g | Approx. 1000 g | Approx. 2250 g | Approx. 3500 g | |
*1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
*2 Dedicated software is available to change gases or change the actual full scale (F.S.) within the range of 30 to 100% (30 to 80% for CO2 only) of the specified full scale.
*3 The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
*4 Guarantee for calibration gas: N2.
*5 Accuracy for calibration gas: N2, flow range (max. full scale).
*6 The operating differential pressure may differ depending on specifications.
*7 Contact us for any other joints.
*8 Exclusive of the weight of joint
For further
information please contact : marketing@wmablog.com