The Model DF-300C Series is a mass flow controller with an integral indicator that operates on a 24-V power supply, as developed in response to the requests from users of the DF Series.
It inherits the features of the DF-200C Series with enhanced convenience, including accuracy of ±1% S.P., response ≤1 sec (in all ranges), and the multiple-gas, multiple-range versatility, i.e.,
support of seven gases (including reference gas) and the ease of changing the flow rate range of each gas.
Features
- High accuracy (±1% S.P.), fast response (≤ 1 sec in all ranges)
- Support of multiple ranges and multiple gases
- Communication functions installed as a standard feature (RS485)
- RoHS CE standard compliant
- Driven by a single 24 V DC supply voltage
- With or without indicator (selectable)
- Selectable Input/output signal
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Specification
| Sensor type | Thermal sensor | |
| Valve type | Normally closed proportional solenoid valve | |
| Applicable gases*1 | N2 (Air, H2, He, Ar, O2, CO2)*2 | |
| Flow range*3 | 10/30/50/100/300/500 SCCM, 1/3/5/10 SLM*2 | |
| Control range | 2 to 100% (F.S.) | |
| Response*4 | Total flow rate control range ±1 sec (within ±2% F.S.) | |
| Accuracy*5 | ±1.0% S.P. (> 35% F.S.) ±0.35% F.S. (≤ 35% F.S.) | |
| Repeatability | ±0.25% F.S. | |
| Operating differential pressure*6 | 50 to 300 kPa (100 to 300 kPa for Ar and CO2) | |
| Inlet maximum pressure | 500kPa（G） | |
| Proof pressure | 980kPa（G） | |
| External leak rate | ≤1.0 x 10-8 Pa·m3/sec (He) | |
| Temperature | Working temp. | 5 to 50℃ |
| Accuracy guaranteed temp. | 15 to 35℃ | |
| Allowable storage temp. | -10 to 60℃ | |
| Permissible ambient humidity Allowable operating humidity | 10 to 90% RH (without dew condensation) | |
| Materials of a gas contact part | SUS316, SUS316L, magnetic stainless steel, Ni, PTFE, PCTFE, and FKM | |
| Electrical connection | D-sub 15-pin male, high density, HR-10A (two) | |
| Flow rate setting signal | 0 to 5 V DC (input impedance: approx. 1 MΩ), or 4 to 20 mA (input impedance: approx. 250 Ω) | |
| Flow rate output signal | 0 to 5 V DC (load resistance 10 kΩ), or 4 to 20 mA (load resistance ≤ 500 Ω) | |
| Digital communication | Address setting with RS485 rotary switch or indicator: up to 99 devices (9600 bps) | |
| Event input | Three contact inputs (non-insulated) | |
| Event output | Three NPN open collectors (non-insulated, max. rating 35 V, 50 mA) | |
| Required power supply (DC) | +24 V DC (±10%), 300 mA max. (DC jack, D-sub) | |
| Joint*7 | 1/4 F900 (standard), 1/4 UJR, Rc 1/4 | |
| Mounting posture | Horizontal installation recommended. | |
| Weight*8 | Approx. 950 g | |