This mass flow controller/meter driven by 24VDC power supply has been developed as a successor of the MODEL
8300. The viewpoint change function of the display unit and the pattern setting function are unique to this model, and noise resistance has been improved dramatically. A sister model with a detachable display and setting unit is also available.
- The high-lift actuator allows this compact model to control a large flow rate.
- Equipped with a display and setting unit, this model can be operated by the 24VDC power supply.
- The RS232C/RS485 communication function and integration function are provided as standard equipment.
- The 14-bit converter permits to display and operation in 4-1/2 digits.
- Control of the flow rate of inflammable gas is possible because the heat generating part of the sensor is not exposed to the gas.
- There are no limitations to the mounting position that may be employed.
- In addition to the SV setting, five other patterns can be set.
- Auto zero and auto close functions are also standard.
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Specification
| ITEM | 8500MC/MM | 8550MC/MM |
| Flow range | 10SCCM〜20SLM | 30SLM〜100SLM |
| （N2 equivalent 20℃/1ATM） | （freely selectable） | （freely selectable） |
| Sensor type | Thermal sensor | |
| Valve type（*1） | Normally closed proportional solenoid valve | |
| Control range（*1） | 2〜100％（F.S.） | 5〜100％（F.S.） |
| Response（*1） | ≤2sec | ≤3sec |
| (within±2%F.S) | (within±2%F.S.) | |
| Accuracy | ±1.0%F.S.（25℃） | ±1.5%F.S.（25℃） |
| Temperature coefficient | ±0.1F.S./℃（15〜35℃） | ±0.2F.S./℃（15〜35℃） |
| Repeatability | ±0.5%F.S. | |
| Operating differential pressure （*1） | F.S.≤5SLM 50〜300kPa（G） | F.S.≤50SLM 150〜300kPa（G） |
| F.S.＞5SLM 100〜300kPa（G） | F.S.＞50SLM 200〜300kPa（G） | |
| Option：Medium differential pressure (MP), low differential pressure (LP) specifications are available | ||
| Allowable operating pressure（*1） | 500kPa（G） or less | |
| Proof pressure | 980kPa（G） | |
| Leak rate | ≤1×10−8Pa・㎥/s（excluding permeation of He） | |
| Allowable operating temperature | 5〜45℃ | |
| Allowable operating humidity | 10〜90％RH（No condensation allowed） | |
| Materials of the gas contact part | Body: SUS316 | |
| Valve seat : FKM（option: CR or NBR） | ||
| Sealing : FKM（option: CR or NBR） | ||
| Electrical connection | Dsub half-pitch 20pin DX10M−20S(HRS) | |
| Flow rate setting signal | 0〜5VDC（input impedance 100kΩ or more) | |
| （*1） | or 4〜20mA selectable | |
| Flow rate output signal | 0〜5VDC（external load resistance 250kΩ or more） or | |
| 4〜20mA （external load resistance 300Ω or less）selectable | ||
| Communication | RS232C（3 wire）or RS485（3 wire） selectable | |
| Other functions | Instantaneous flow rate・integrated flow rate display （ 7-segment 4-digit LED | |
| display accuracy ±1% integrated display 0000〜9999MAX）, | ||
| Alarm output（NPN open collector output 2 points | ||
| Max DC35V 50mA）, pattern setting（5 pattern） function | ||
| Required power supply | 24VDC±10%（ripple 5%） current consumption 300mA max | |
| Joint | Standard 1/4F900（9/16-18UNF） | Standard 3/8F900（9/16−18UNF） |
| （Main unit bore） | Option 1/8F900, 1/4UJR, | Option 1/2F900, 3/8UJR, |
| Rc1/4 etc. | Rc3/8 etc. | |
| Weight | Approx. 1200g | Approx. 1500g |
(*1)Only for the mass flow controller.
